Chemical Mechanical Polishing

I-chemical-mechanical polishing (CMP) ivamise ukubandakanyeka ekukhiqizeni izindawo ezibushelelezi ngokusabela kwamakhemikhali, ikakhulukazi isebenza embonini yokukhiqiza i-semiconductor.I-Lonnmeter, umsunguli othembekile oneminyaka engaphezu kwengu-20 yobungcweti ekulinganiseni okugxilile okusemgqeni, unikeza ubuciko besimanjeamamitha we-non-nuclear densitykanye nezinzwa ze-viscosity ukubhekana nezinselele zokulawulwa kodaka.

Ukubaluleka Kwekhwalithi Ye-Slurry kanye Nobuchwepheshe Be-Lonnmeter

I-chemical mechanical polishing slurry iwumgogodla wenqubo ye-CMP, enquma ukufana kanye nekhwalithi yezindawo ezingaphezulu. Ukuminyana kwe-slurry okungahambisani noma i-viscosity kungaholela ekulimaleni okufana nokuklwebheka okuncane, ukususwa kwempahla engalingani, noma ukuvaleka kwamaphedi, okona ikhwalithi yamawafa kanye nokwenyusa izindleko zokukhiqiza. I-Lonnmeter, umholi womhlaba wonke ezixazululweni zokulinganisa zezimboni, igxile ekulinganiseni udaka olungaphakathi komugqa ukuze kuqinisekiswe ukusebenza kahle kodaka. Ngomlando oqinisekisiwe wokuletha izinzwa ezithembekile, ezinemba okuphezulu, i-Lonnmeter ibambisene nabakhiqizi abahamba phambili be-semiconductor ukuze kuthuthukiswe ukulawulwa kwenqubo nokusebenza kahle. Amamitha awo angewona awe-nuclear slurry density kanye nezinzwa ze-viscosity ahlinzeka ngedatha yesikhathi sangempela, okuvumela ukulungiswa okunembayo ukuze kugcinwe ukungaguquguquki kwe-slurry kanye nokuhlangabezana nezidingo eziqinile zokukhiqiza i-semiconductor yesimanje.

Ngaphezulu kweminyaka engamashumi amabili yesipiliyoni esilinganisweni sokugxiliswa okusemgqeni, okuthenjwa amafemu aphezulu e-semiconductor. Izinzwa ze-Lonnmeter zenzelwe ukuhlanganiswa okungenamthungo kanye nokugcinwa kweqanda, ukunciphisa izindleko zokusebenza.Izixazululo ezihambisanayo ukuhlangabezana nezidingo ezithile zenqubo, ukuqinisekisa ukuvunwa kwama-wafer aphezulu kanye nokuhambisana.

Iqhaza Le-Chemical Mechanical polishing Emkhiqizweni weSemiconductor

I-Chemical mechanical polishing (CMP), okuphinde kubizwe ngokuthi yi-chemical-mechanical planarization, iyisisekelo sokukhiqiza i-semiconductor, okuvumela ukudalwa kwezindawo eziyisicaba, ezingenasici zokukhiqiza ama-chip athuthukile. Ngokuhlanganisa ukufakwa kwamakhemikhali nokuhuzuka komshini, inqubo ye-CMP iqinisekisa ukunemba okudingekayo kumasekethe ahlanganisiwe anezendlalelo eziningi kumanodi angaphansi kuka-10nm. Ikhemikhali yokupholisha i-slurry, ehlanganiswe ngamanzi, ama-reagents amakhemikhali, kanye nezinhlayiya ezilumayo, isebenzisana nephedi yokupholisha kanye ne-wafer ukuze isuse into efanayo. Njengoba imiklamo ye-semiconductor ishintsha, inqubo ye-CMP ibhekene nobunzima obandayo, obudinga ukulawulwa okuqinile phezu kwezakhiwo ezidaka ukuze kuvinjelwe amaphutha futhi kuzuzwe amawafa abushelelezi, aphucuziwe afunwa ngabakwa-Semiconductor Foundries and Materials Suppliers.

Inqubo ibalulekile ekukhiqizeni ama-chips angu-5nm no-3nm anokukhubazeka okuncane, okuqinisekisa izindawo eziyisicaba ukuze kufakwe kahle izendlalelo ezilandelayo. Ngisho nokungahambisani okuncane kwe-slurry kungaholela ekusebenzeni kabusha okubizayo noma ukulahlekelwa kwesivuno.

Izinselelo Zokuqapha Izakhiwo Ezinodaka

Ukugcina ukuminyana kwe-slurry okungaguquki kanye ne-viscosity enqubweni yokupholisha ngomshini wamakhemikhali kugcwele izinselele. Izakhiwo ze-slurry zingahluka ngenxa yezinto ezifana nezokuthutha, ukuhlanjululwa ngamanzi noma i-hydrogen peroxide, ukuxuba okunganele, noma ukuwohloka kwamakhemikhali. Isibonelo, ukuhlala kwezinhlayiyana kuma-slurry totes kungabangela ukuminyana okuphezulu ngezansi, okuholela ekupholiseni okungeyona into efanayo. Izindlela zokuqapha zendabuko ezifana ne-pH, amandla okunciphisa i-oxidation (ORP), noma ukuqhutshwa kwe-conductivity ngokuvamile ayanele, njengoba zehluleka ukuthola izinguquko ezicashile ekubunjweni kodaka. Le mikhawulo ingaholela ekulimaleni, ukunciphisa amazinga okususwa, kanye nokwenyuka kwezindleko ezithengekayo, okubeka ubungozi obubalulekile kubakhiqizi bemishini ye-semiconductor kanye nabahlinzeki bezinsizakalo ze-CMP. Izinguquko zokuhlanganisa ngesikhathi sokuphatha nokusabalalisa zithinta ukusebenza. I-Sub-10nm node idinga ukulawula okuqinile phezu kokuhlanzeka kodaka kanye nokunemba kwenhlanganisela. I-pH ne-ORP zibonisa ukuhluka okuncane, kuyilapho ukuqhutshwa kwe-conductivity kuyehluka ngokuguga okunodaka. Izakhiwo ze-slurry ezingahambisani zingakhuphula amazinga okukhubazeka aze afike ku-20%, ngocwaningo lwemboni ngayinye.

Izinzwa Ezingaphakathi Kwe-Lonnmeter Zokuqapha Isikhathi Sangempela

I-Lonnmeter ibhekana nalezi zinselele ngamamitha ayo athuthukile okungewona awe-nuclear futhiizinzwa ze-viscosity, okuhlanganisa imitha ye-viscosity emgqeni wezilinganiso ze-viscosity ezise-in-line kanye nemitha ye-ultrasonic density ye-slurry density kanye nokuqapha kwe-viscosity ngesikhathi esisodwa. Lezi zinzwa zenzelwe ukuhlanganiswa okungenamthungo kuzinqubo ze-CMP, ezifaka ukuxhumana okujwayelekile komkhakha. Izixazululo ze-Lonnmeter zinikeza ukwethembeka kwesikhathi eside kanye nokunakekelwa okuphansi ekwakhiweni kwayo okuqinile. Idatha yesikhathi sangempela inika amandla o-opharetha ukuthi balungise kahle izingxube ze-slurry, bavimbele amaphutha, futhi bathuthukise ukusebenza kokupholisha, okwenza lawa mathuluzi abe semqoka kubahlinzeki bezinto zokuhlaziya nokuhlola kanye nabahlinzeki bezinto ezisetshenziswayo ze-CMP.

Izinzuzo Zokuqapha Okuqhubekayo Kokuthuthukisa I-CMP

Ukuqapha okuqhubekayo ngezinzwa ezisemlayini ze-Lonnmeter kuguqula inqubo yokupholisha amakhemikhali ngokuletha imininingwane engenzeka kanye nokonga kwezindleko. Isilinganiso sesikhathi sangempela sokuminyana kwe-slurry kanye nokuqapha kwe-viscosity kunciphisa amaphutha afana nokuklwebheka noma ukupholisha ngokweqile kufika ku-20%, ngokuya ngezilinganiso zomkhakha. Ukuhlanganiswa nohlelo lwe-PLC kunika amandla ukudosa okuzenzakalelayo nokulawulwa kwenqubo, kuqinisekisa ukuthi izakhiwo eziludaka zihlala ngaphakathi kobubanzi obufanele. Lokhu kuholela ekwehliseni ngo-15-25% wezindleko ezisetshenziswayo, isikhathi sokuphumula esincishisiwe, kanye nokufana kwe-wafer okuthuthukisiwe. Ku-Semiconductor Foundries kanye Nabahlinzeki Bezinsizakalo Ze-CMP, lezi zinzuzo zihumushela ekukhiqizeni okuthuthukisiwe, amamajini enzuzo ephakeme, nokuthobelana namazinga afana ne-ISO 6976.

Imibuzo Ejwayelekile Mayelana Nokuqapha I-Slurry ku-CMP

Kungani ukuminyana kodaka kubalulekile ku-CMP?

Ukulinganisa ukuminyana kwe-slurry kuqinisekisa ukusatshalaliswa kwezinhlayiyana okufanayo kanye nokuvumelana kwenhlanganisela, ukuvimbela amaphutha nokuthuthukisa amazinga okususwa enqubweni yokupholisha amakhemikhali. Isekela ukukhiqizwa kwe-wafer yekhwalithi ephezulu kanye nokuhambisana nezindinganiso zomkhakha.

Ukuqapha kwe-viscosity kuthuthukisa kanjani ukusebenza kahle kwe-CMP?

Ukuqapha i-viscosity kugcina ukugeleza kwe-slurry okungaguquki, kuvimbela izinkinga ezifana nokuvala amaphedi noma ukupholisha okungalingani. Izinzwa ezingaphakathi kwe-Lonnmeter zihlinzeka ngedatha yesikhathi sangempela ukuze kuthuthukiswe inqubo ye-CMP futhi kuthuthukiswe ukuvunwa kwama-wafer.

Yini eyenza amamitha we-Lonnmeter angewona ama-slurry slurry ahluke?

Amamitha we-Lonnmeter okungewona awe-nuclear slurry density ahlinzeka ngasikhathi sinye ukuminyana kanye nezilinganiso ze-viscosity ngokunemba okuphezulu kanye nokugcinwa kweqanda. Idizayini yabo eqinile iqinisekisa ukwethembeka ezindaweni zenqubo ye-CMP efunwayo.

Isilinganiso sesikhathi sangempela sokuminyana kwe-slurry kanye nokuqapha i-viscosity kubalulekile ekuthuthukiseni inqubo yokupholisha ngomshini wamakhemikhali ekukhiqizeni ama-semiconductor. Amamitha we-slurry density ye-Lonnmeter okungewona awe-nuclear nezinzwa ze-viscosity zinikeza Abakhiqizi Bezinto Zokusebenzisa i-Semiconductor, i-CMP Consumables Suppliers, kanye ne-Semiconductor Foundries ngamathuluzi okunqoba izinselele zokulawulwa kodaka, ukunciphisa amaphutha, kanye nezindleko eziphansi. Ngokuletha idatha enembile, yesikhathi sangempela, lezi zixazululo zithuthukisa ukusebenza kahle kwenqubo, ziqinisekisa ukuthobelana, futhi ziqhubekisele phambili inzuzo emakethe yokuncintisana ye-CMP. VakashelaIwebhusayithi yeLonnmeternoma uxhumane nethimba labo namuhla ukuze uthole ukuthi i-Lonnmeter ingawuguqula kanjani umsebenzi wakho wokupholisha ngomshini wamakhemikhali.

Thatha Isinyathelo Manje

Isikhathi sokuthumela: Jul-22-2025